3D Correction for Dolan Technique
Motivation:
The Niemeyer-Dolan technique, also known as shadow evaporation, creates nanometer-scale overlapping structures in thin-film lithography. Using a suspended evaporation mask, precise angles allow shadow images to project onto the substrate, forming well-defined geometries.
For a stable production, the precise control of opening and undercuts is essential for Dolan technique.
Solution:
Dolan Technique utilizes multilayer processes with overlapping structures. BEAMER incorporates 3D Edge Correction in this process to precisely control the opening and undercut.