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BEAMER
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TRACER
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Applications
Beamer
PEC
3D Correction for Dolan Technique
Exposure dose for targets and large areas
Influence of Shape PEC on Resist Profile
3D E-beam lithography
Managing PEC Data Volume to Improve Throughput
Dose Assignments for Exposures on Thin Membranes
Optimisation of relative dose exposure for critical features
Laser PEC
Laser Grayscale Lithography
Writing Strategy
Exposure Strategies for Optimised Writing
Multipass Techniques
Bulk & sleeving of patterns for time writing optimisation
Fracturing of periodic layouts for photonic crystals
Data handling
Designing Fresnel zone plates using formulas in BEAMER
Filling arbitrary shapes with tilted gratings
Pattern replacement and filtering for post processing
Loops, Variables and Functions
Using Loop module in BEAMER
BEAMER & Python
Python - Graphical User Interfaces
Lab
SÜSS-MicroOptics Source Mask Optimisation
LAB simulation methods and Optical Proximity Correction in Lithography
Projection Simulation Example
Tracer
Handling materials in TRACER for group and individuals
Using TRACER to Estimate the Base-Dose for Different Substrates
In-Action
Webinar Series: Proximity Effect in E-Beam Lithography
Part 2 – Dose PEC Algorithm and Parameter
Part 3 – Optimization of Dose PEC Parameter
Part 4 – Process Effect, Calibration and Correction
Part 5 – Shape PEC – “ODUS” Contrast Enhancement
Part 6 - 3D Surface PEC for greyscale lithography
Part 7 - 3D T-Gate and Edge PEC for multilayer resist
Webinar Series: BEAMER Training
Part 2 – Optimization – Field Control
Part 3 – Layout Operation
Part 4 – Standard Dose PEC - Intro
Part 5 – Standard Dose PEC - Parameters
Webinar: LAB Simulation of Proximity Lithography
Webinar: LAB Simulation of Projection Lithography
Webinar: LAB Simulation of Laser Lithography
Webinar: LAB Simulation of E-BEAM Lithography
Download
BEAMER Download
TRACER Download
LAB Download
VIEWER Download
ProSEM Download
InSPEC Download
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SUPPORT
Skip navigation
Products
BEAMER
LAB
TRACER
MASKER
ProSEM
InSPEC
Applications
Beamer
PEC
3D Correction for Dolan Technique
Exposure dose for targets and large areas
Influence of Shape PEC on Resist Profile
3D E-beam lithography
Managing PEC Data Volume to Improve Throughput
Dose Assignments for Exposures on Thin Membranes
Optimisation of relative dose exposure for critical features
Laser PEC
Laser Grayscale Lithography
Writing Strategy
Exposure Strategies for Optimised Writing
Multipass Techniques
Bulk & sleeving of patterns for time writing optimisation
Fracturing of periodic layouts for photonic crystals
Data handling
Designing Fresnel zone plates using formulas in BEAMER
Filling arbitrary shapes with tilted gratings
Pattern replacement and filtering for post processing
Loops, Variables and Functions
Using Loop module in BEAMER
BEAMER & Python
Python - Graphical User Interfaces
Lab
SÜSS-MicroOptics Source Mask Optimisation
LAB simulation methods and Optical Proximity Correction in Lithography
Projection Simulation Example
Tracer
Handling materials in TRACER for group and individuals
Using TRACER to Estimate the Base-Dose for Different Substrates
In-Action
Webinar Series: Proximity Effect in E-Beam Lithography
Part 2 – Dose PEC Algorithm and Parameter
Part 3 – Optimization of Dose PEC Parameter
Part 4 – Process Effect, Calibration and Correction
Part 5 – Shape PEC – “ODUS” Contrast Enhancement
Part 6 - 3D Surface PEC for greyscale lithography
Part 7 - 3D T-Gate and Edge PEC for multilayer resist
Webinar Series: BEAMER Training
Part 2 – Optimization – Field Control
Part 3 – Layout Operation
Part 4 – Standard Dose PEC - Intro
Part 5 – Standard Dose PEC - Parameters
Webinar: LAB Simulation of Proximity Lithography
Webinar: LAB Simulation of Projection Lithography
Webinar: LAB Simulation of Laser Lithography
Webinar: LAB Simulation of E-BEAM Lithography
Download
BEAMER Download
TRACER Download
LAB Download
VIEWER Download
ProSEM Download
InSPEC Download
Corporate
News & Events
GenISys Profile
GenISys History
Career Opportunities
Login
Contact
SUPPORT
InSPEC Download
InSPEC Download
Windows 11 (64bit)
InSPEC-2.4.0.6_x64.exe
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InSPEC Download
